- Bubble Leak Detectors
- Airtightness Testers
- Gas Detectors
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Mass Spectrometers
HM-100 residual gas analyzer (RGA) HM-200 online mass spectrometer HM-210 online mass spectrometer HM-310 atmospheric-pressure electrolyte leak detector HM-500 multi-gas leak detector HM-230 Multi-Pressure Residual Gas Analyzer HM-150 High-Pressure Residual Gas Analyzer HM-130 High-Performance Residual Gas Analyzer
- Helium Mass Spectrometer Leak Detectors
- Test Platforms
- Fixtures
- Accessories
HM-130 High-Performance Residual Gas Analyzer
- Ultra-High Sensitivity
- With a minimum detectable partial pressure of 2E-15 Torr, it accurately captures ultra-low concentration gas impurities.
- Instantaneous Response
- Features high-speed scanning at 2 ms/data point, enabling real-time detection of transient process changes.
- Wide-Range Detection
- Covers the full range of 1 to 300 amu, supporting qualitative and quantitative analysis across diverse scenarios and various gases.
- Stable and Reliable
- Designed for the demanding environments of semiconductors and vacuum coating, it maintains stable performance over long-term operation, ensuring a high degree of consistency in mass production processes.
Product Overview
Specifically tailored for semiconductor and vacuum processes, the HM-130 High-Performance RGA leverages proprietary core technology to equip vacuum manufacturing with a digital "eye of insight."
Specifications
Application Scenarios
Application Examples
