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HM-230 Multi-Pressure Residual Gas Analyzer
Wide Pressure Adaptability
Full-range coverage from 1E-8 Torr to 1.2 atm. Choose from 3 mass ranges (1-100/200/300 amu) for precise, real-time monitoring of critical gases (H₂, He, N₂, O₂, Ar).
Real-Time Online Analysis
Millisecond response time captures dynamic gas changes instantly. Immediate alarms alert you to abnormal fluctuations, ensuring process safety.
All-in-One Integration
Combines RGA, vacuum, and sampling modules into a compact system. Skip the complex vacuum setup—just connect and test for fast, hassle-free implementation.
Contamination-Resistant Design
Equipped with anti-fouling coatings and surface passivation to repel process deposits. Protects core components and significantly extends instrument lifespan.
Product Overview

The HM-230 Multi-Pressure Residual Gas Analyzer is an all-in-one online mass spectrometry system incorporating an RGA, vacuum system, and smart sampling module. Engineered for complex multi-pressure environments, it safeguards the stable operation of your advanced manufacturing processes.

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